Summary |
A detailed understanding of the following aspects of SEMI S2-93(a): Interlocks, Electrical, Emergency Shutdown, Ergonomics and Human Factors, Chemicals, Exhaust and Ventilation, Environmental, Radiation, Noise, Earthquake Protection, Heated Chemical Baths, Fire Protection, Hazard Warning, Documentation, Robotics and Automation, Practical examples and an overview of the important practical differences between SEMI S2-93(a) and SEMI S2-0200. |